Installation fixture for elastomer bands and methods of using the same

A method of installing an elastomer band as a protective edge seal around a portion of a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber, which includes expanding an elastomer band into a circular shape having a diameter greater than a dia...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NEWTON NEAL
Format:	Patent
Sprache:	eng
Schlagworte:	COMBINED OPERATIONS MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OTHER WORKING OF METAL PERFORMING OPERATIONS TRANSPORTING UNIVERSAL MACHINE TOOLS
Online-Zugang:	Volltext bestellen
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