Portable wireless sensor

The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is d...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG YEHIEH, PAI JIUN-RONG, LIU HSU-SHUI
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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