Portable wireless sensor

Portable wireless sensor

The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is d...

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Hauptverfasser: WANG YEHIEH, PAI JIUN-RONG, LIU HSU-SHUI
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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creator WANG YEHIEH
PAI JIUN-RONG
LIU HSU-SHUI
description The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is different from the second fabrication process parameter. The portable device also includes a wireless transceiver that is coupled to the first and second sensors. The wireless transceiver receives the first and second fabrication process parameters and transmits wireless signals containing the first and second fabrication process parameters.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US8676537B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US8676537B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US8676537B23</originalsourceid><addsrcrecordid>eNrjZJAIyC8qSUzKSVUozyxKzUktLlYoTs0rzi_iYWBNS8wpTuWF0twMCm6uIc4euqkF-fGpxQWJyal5qSXxocEWZuZmpsbmTkbGRCgBANLAImY</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Portable wireless sensor</title><source>esp@cenet</source><creator>WANG YEHIEH ; PAI JIUN-RONG ; LIU HSU-SHUI</creator><creatorcontrib>WANG YEHIEH ; PAI JIUN-RONG ; LIU HSU-SHUI</creatorcontrib><description>The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is different from the second fabrication process parameter. The portable device also includes a wireless transceiver that is coupled to the first and second sensors. The wireless transceiver receives the first and second fabrication process parameters and transmits wireless signals containing the first and second fabrication process parameters.</description><language>eng</language><subject>CALCULATING ; COMPUTING ; COUNTING ; ELECTRIC DIGITAL DATA PROCESSING ; PHYSICS</subject><creationdate>2014</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20140318&amp;DB=EPODOC&amp;CC=US&amp;NR=8676537B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20140318&amp;DB=EPODOC&amp;CC=US&amp;NR=8676537B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WANG YEHIEH</creatorcontrib><creatorcontrib>PAI JIUN-RONG</creatorcontrib><creatorcontrib>LIU HSU-SHUI</creatorcontrib><title>Portable wireless sensor</title><description>The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is different from the second fabrication process parameter. The portable device also includes a wireless transceiver that is coupled to the first and second sensors. The wireless transceiver receives the first and second fabrication process parameters and transmits wireless signals containing the first and second fabrication process parameters.</description><subject>CALCULATING</subject><subject>COMPUTING</subject><subject>COUNTING</subject><subject>ELECTRIC DIGITAL DATA PROCESSING</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2014</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJAIyC8qSUzKSVUozyxKzUktLlYoTs0rzi_iYWBNS8wpTuWF0twMCm6uIc4euqkF-fGpxQWJyal5qSXxocEWZuZmpsbmTkbGRCgBANLAImY</recordid><startdate>20140318</startdate><enddate>20140318</enddate><creator>WANG YEHIEH</creator><creator>PAI JIUN-RONG</creator><creator>LIU HSU-SHUI</creator><scope>EVB</scope></search><sort><creationdate>20140318</creationdate><title>Portable wireless sensor</title><author>WANG YEHIEH ; PAI JIUN-RONG ; LIU HSU-SHUI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US8676537B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2014</creationdate><topic>CALCULATING</topic><topic>COMPUTING</topic><topic>COUNTING</topic><topic>ELECTRIC DIGITAL DATA PROCESSING</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>WANG YEHIEH</creatorcontrib><creatorcontrib>PAI JIUN-RONG</creatorcontrib><creatorcontrib>LIU HSU-SHUI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WANG YEHIEH</au><au>PAI JIUN-RONG</au><au>LIU HSU-SHUI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Portable wireless sensor</title><date>2014-03-18</date><risdate>2014</risdate><abstract>The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is different from the second fabrication process parameter. The portable device also includes a wireless transceiver that is coupled to the first and second sensors. The wireless transceiver receives the first and second fabrication process parameters and transmits wireless signals containing the first and second fabrication process parameters.</abstract><oa>free_for_read</oa></addata></record>
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subjects CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
title Portable wireless sensor
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-20T01%3A51%3A58IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=WANG%20YEHIEH&rft.date=2014-03-18&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS8676537B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true