Integrated circuit test units with integrated physical and electrical test regions

A device includes a test unit in a die. The test unit includes a physical test region including an active region, and a plurality of conductive lines over the active region and parallel to each other. The plurality of conductive lines has substantially a uniform spacing, wherein no contact plugs are...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE CHIENANG, LIU HENG-HSIN, TSENG HUANI, KUO SHUNG, LIN CHUN-HUNG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!