Method for testing a microelectromechanical device, microelectromechanical device

Described herein is a method for testing a microelectromechanical device provided with a microstructure having a fixed structure and a movable mass, which is capacitively coupled to the fixed structure and mechanically connected thereto so as to be movable between a rest position and at least one po...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LASALANDRA ERNESTO, UNGARETTI TOMMASO, TRIPOLI GIOVANNI CARLO
Format:	Patent
Sprache:	eng
Schlagworte:	CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR INSTRUMENT DETAILS PHYSICS
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