Uncooled infrared imaging element and manufacturing method thereof

An uncooled infrared imaging element includes a pixel region, a device region, and a support substrate. The pixel region includes heat-sensitive pixels. The heat-sensitive pixels are arranged in a matrix and change current-voltage characteristics thereof in accordance with receiving amounts of infra...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUJIWARA IKUO, YAGI HITOSHI, SASAKI KEITA, ATSUTA MASAKI, FUNAKI HIDEYUKI, SUZUKI KAZUHIRO, HONDA HIROTO, ISHII KOICHI, OGATA MASAKO, UENO RISAKO, KWON HONAM
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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