Angular rate sensor with suppressed linear acceleration response

An angular rate sensor having two generally planar proof masses disposed along a drive axis in the plane of the masses, a sense axis perpendicular to the drive axis, and an input axis perpendicular to the plane of the masses. The masses are suspended from a pair of driving frames, which are mounted...

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1. Verfasser: MAO MINYAO
Format: Patent
Sprache:eng
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