Noncontact surface shape measuring method and apparatus thereof

Even if a return beam from a work to be measured does not agree with the center of a two-piece sensor, a correction value is calculated according to a voltage difference between two sensors of the two-piece sensor if the voltage difference is within a neighborhood range. The correction value is adde...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TSUKAMOTO TAKAO, ISHIMA MINORU, HIROSE HAJIME, MIURA KATSUHIRO, KOTAJIMA HIDEO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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