Transparent material processing with an ultrashort pulse laser

Methods for ultrashort pulse laser processing of optically transparent materials. A method for scribing transparent materials uses ultrashort laser pulses to create multiple scribe features with a single pass of the laser beam across the material, with at least one of the scribe features being forme...

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Bibliographische Detailangaben
Hauptverfasser: BOVATSEK JAMES, YOSHINO FUMIYO, ARAI ALAN Y
Format: Patent
Sprache:eng
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