Corner chamber with heater
A disk processing system with a corner chamber having a heater assembly and a carrier rotary assembly configured to rotate the heater assembly.
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| creator | TABURAZA NOE D CHEN JINLIANG |
| description | A disk processing system with a corner chamber having a heater assembly and a carrier rotary assembly configured to rotate the heater assembly. |
| format | Patent |
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| language | eng |
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| subjects | BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
| title | Corner chamber with heater |
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