Substrate processing apparatus

Substrate processing apparatus

The object of the present invention is to provide a substrate processing apparatus and a substrate processing system capable of performing an appropriate processing in response to the operating condition of the substrate processing apparatus and of realizing an improvement in the availability rate o...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: YONEBAYASHI TORU
Format: Patent
Sprache:eng
Schlagworte:
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator YONEBAYASHI TORU
description The object of the present invention is to provide a substrate processing apparatus and a substrate processing system capable of performing an appropriate processing in response to the operating condition of the substrate processing apparatus and of realizing an improvement in the availability rate of the apparatus. The substrate processing apparatus includes: storage section for storing a plurality of recipes describing a procedure for processing a substrate and operating authorities of a user corresponding to the plurality of recipes; and display section for displaying an authority setting screen for setting the operating authorities of the user to the respective recipes and an edition screen for editing a recipe stored in the storage section on the basis of the operating authority set via the authority setting screen. The substrate processing apparatus can edit the authority setting screen displayed by the display section and can set different operating authorities to the recipe between when the operating condition of the substrate processing apparatus is online and when the operating condition of the substrate processing apparatus is offline.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US8510790B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US8510790B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US8510790B23</originalsourceid><addsrcrecordid>eNrjZJALLk0qLilKLElVKCjKT04tLs7MS1dILChIBIqVFvMwsKYl5hSn8kJpbgYFN9cQZw_d1IL8-NTigsTk1LzUkvjQYAtTQwNzSwMnI2MilAAA8nMk3g</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Substrate processing apparatus</title><source>esp@cenet</source><creator>YONEBAYASHI TORU</creator><creatorcontrib>YONEBAYASHI TORU</creatorcontrib><description>The object of the present invention is to provide a substrate processing apparatus and a substrate processing system capable of performing an appropriate processing in response to the operating condition of the substrate processing apparatus and of realizing an improvement in the availability rate of the apparatus. The substrate processing apparatus includes: storage section for storing a plurality of recipes describing a procedure for processing a substrate and operating authorities of a user corresponding to the plurality of recipes; and display section for displaying an authority setting screen for setting the operating authorities of the user to the respective recipes and an edition screen for editing a recipe stored in the storage section on the basis of the operating authority set via the authority setting screen. The substrate processing apparatus can edit the authority setting screen displayed by the display section and can set different operating authorities to the recipe between when the operating condition of the substrate processing apparatus is online and when the operating condition of the substrate processing apparatus is offline.</description><language>eng</language><subject>ELECTRIC COMMUNICATION TECHNIQUE ; ELECTRICITY ; TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130813&amp;DB=EPODOC&amp;CC=US&amp;NR=8510790B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130813&amp;DB=EPODOC&amp;CC=US&amp;NR=8510790B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YONEBAYASHI TORU</creatorcontrib><title>Substrate processing apparatus</title><description>The object of the present invention is to provide a substrate processing apparatus and a substrate processing system capable of performing an appropriate processing in response to the operating condition of the substrate processing apparatus and of realizing an improvement in the availability rate of the apparatus. The substrate processing apparatus includes: storage section for storing a plurality of recipes describing a procedure for processing a substrate and operating authorities of a user corresponding to the plurality of recipes; and display section for displaying an authority setting screen for setting the operating authorities of the user to the respective recipes and an edition screen for editing a recipe stored in the storage section on the basis of the operating authority set via the authority setting screen. The substrate processing apparatus can edit the authority setting screen displayed by the display section and can set different operating authorities to the recipe between when the operating condition of the substrate processing apparatus is online and when the operating condition of the substrate processing apparatus is offline.</description><subject>ELECTRIC COMMUNICATION TECHNIQUE</subject><subject>ELECTRICITY</subject><subject>TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJALLk0qLilKLElVKCjKT04tLs7MS1dILChIBIqVFvMwsKYl5hSn8kJpbgYFN9cQZw_d1IL8-NTigsTk1LzUkvjQYAtTQwNzSwMnI2MilAAA8nMk3g</recordid><startdate>20130813</startdate><enddate>20130813</enddate><creator>YONEBAYASHI TORU</creator><scope>EVB</scope></search><sort><creationdate>20130813</creationdate><title>Substrate processing apparatus</title><author>YONEBAYASHI TORU</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US8510790B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2013</creationdate><topic>ELECTRIC COMMUNICATION TECHNIQUE</topic><topic>ELECTRICITY</topic><topic>TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION</topic><toplevel>online_resources</toplevel><creatorcontrib>YONEBAYASHI TORU</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YONEBAYASHI TORU</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Substrate processing apparatus</title><date>2013-08-13</date><risdate>2013</risdate><abstract>The object of the present invention is to provide a substrate processing apparatus and a substrate processing system capable of performing an appropriate processing in response to the operating condition of the substrate processing apparatus and of realizing an improvement in the availability rate of the apparatus. The substrate processing apparatus includes: storage section for storing a plurality of recipes describing a procedure for processing a substrate and operating authorities of a user corresponding to the plurality of recipes; and display section for displaying an authority setting screen for setting the operating authorities of the user to the respective recipes and an edition screen for editing a recipe stored in the storage section on the basis of the operating authority set via the authority setting screen. The substrate processing apparatus can edit the authority setting screen displayed by the display section and can set different operating authorities to the recipe between when the operating condition of the substrate processing apparatus is online and when the operating condition of the substrate processing apparatus is offline.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US8510790B2
source esp@cenet
subjects ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION
title Substrate processing apparatus
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-20T11%3A56%3A52IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=YONEBAYASHI%20TORU&rft.date=2013-08-13&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS8510790B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true