Techniques for improving extracted ion beam quality using high-transparency electrodes

Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion sour...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SINCLAIR FRANK, PURSER KENNETH H, BORICHEVSKY STEVEN, COBB ERIC R, CHANEY CRAIG R, PATEL SHARDUL S, RADOVANOV SVETLANA, JAGTAP MAYUR, PLATOW WILHELM, LISCHER D. JEFFREY, BENVENISTE VICTOR, BUFF JAMES S, KOO BON-WOONG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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