Angular rate sensor with suppressed linear acceleration response

An angular rate sensor having two generally planar proof masses, a sense axis in the plane of the masses, and an input axis perpendicular to the sense axis. The masses are suspended from a driving frame, which is mounted for torsional movement about the input axis in drive-mode. And the masses are c...

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1. Verfasser: MAO MINYAO
Format: Patent
Sprache:eng
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