Method of manufacturing a micro-electro-mechanical system (MEMS)

A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes patterning a wiring layer to form at least one fixed plate and forming a sacrificial material on the wiring layer. The method further includes forming an insulator layer of one or more films over the at least one fixed...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	STAMPER ANTHONY K, TWOMBLY JOHN G
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
Online-Zugang:	Volltext bestellen
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