Micromechanical structure and method for operating a micromechanical structure

A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a s...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MEISEL DANIEL CHRISTOPH
Format:	Patent
Sprache:	eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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