Method for generating alignment marks

A method (100), an apparatus (1100), and a computer program product are disclosed for generating alignment marks. A basis pattern (120) and a high frequency component (130) are combined (140). The basis pattern is defined such that a scaled and rotated version of the basis pattern correlated with th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YENSON BRENDON, RUDKIN SCOTT ALEXANDER
Format: Patent
Sprache:eng
Schlagworte:
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