Scanning probe microscope

Scanning probe microscope

The invention relates to a scanning probe microscope comprising: a specimen holder holding a specimen; and a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the s...

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Hauptverfasser: RIJNDERS AUGUSTINUS JOSEPHUS HELENA MARIA, BLANK DAVID HERMANUS ADRIANUS, ROESTHUIS FRANK JOHAN GERHARDUS, BROEKMAAT JOSKA JOHANNES
Format: Patent
Sprache:eng
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APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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creator RIJNDERS AUGUSTINUS JOSEPHUS HELENA MARIA
BLANK DAVID HERMANUS ADRIANUS
ROESTHUIS FRANK JOHAN GERHARDUS
BROEKMAAT JOSKA JOHANNES
description The invention relates to a scanning probe microscope comprising: a specimen holder holding a specimen; and a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the specimen is tilted relative to at least one of the two orthogonal horizontal directions.
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subjects APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
title Scanning probe microscope
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