Variable capacity element

A variable capacity element has a substrate, a pair of capacitor electrodes, a pair of driver electrodes, and a pair of capacitor wirings why one of the capacitor electrodes is movable by applying a voltage between the driver electrodes. A pair of driver electrodes are connected to the pair of capac...

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Bibliographische Detailangaben
1. Verfasser: ENDO MITSUYOSHI
Format: Patent
Sprache:eng
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