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A semiconductor process and apparatus includes forming first and second gate electrodes (151, 161) by forming the first gate electrode (151) over a first high-k gate dielectric (121) and forming the second gate electrode (161) over at least a second high-k gate dielectric (122) different from the fi...

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Bibliographische Detailangaben
Hauptverfasser: ADETUTU OLUBUNMI O, TRIYOSO DINA H
Format: Patent
Sprache:eng
Schlagworte:
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