MIM capacitor and method of making same

MIM capacitor and method of making same

A MIM capacitor device and method of making the device. The device includes an upper plate comprising one or more electrically conductive layers, a dielectric block comprising one or more dielectric layers, a lower plate comprising one or more electrically conductive layer; and a spreader plate comp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RASSEL ROBERT MARK, COOLBAUGH DOUGLAS DUANE, HE ZHONG-XIANG, ESHUN EBENEZER E
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A MIM capacitor device and method of making the device. The device includes an upper plate comprising one or more electrically conductive layers, a dielectric block comprising one or more dielectric layers, a lower plate comprising one or more electrically conductive layer; and a spreader plate comprising one or more electrically conductive layers.