Removal of surface oxides by electron attachment

Described herein are a method and an apparatus for removing metal oxides from a substrate surface within a target area. In one particular embodiment, the method and apparatus has an energizing electrode which has an array of protruding conductive tips that are electrically connected by a conductive...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ARSLANIAN GREGORY KHOSROV, PATRICK RICHARD E, GHOSH RANAJIT, DONG CHUN CHRISTINE
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR CHEMISTRY ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROMOBJECTS
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