Method to electrodeposit metals using ionic liquids

The present invention relates to a method to electroplate or electropolish a metal on a substrate wherein an ionic liquid is selected from the group of N+R1R2R3R4 X− or N+R5R6R7R8 Y− is employed as electrolyte, and a metal salt added to the ionic liquid is employed as the metal source or a metal ano...

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Bibliographische Detailangaben
Hauptverfasser: KUZMANOVIC BORIS, SPEELMAN JOHANNA CHRISTINA, BARTEL COLIN ERIC, VAN STRIEN CORNELIS JOHANNES GOVARDUS, ZEITLER MICHAEL
Format: Patent
Sprache:eng
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