Infrared sensors, focal plane arrays and thermal imaging systems with temperature compensation

An infrared sensor and infrared imaging system, wherein said infrared sensor comprises: a first film structure, a second film structure, a gap between said first film structure and said second film structure. Reference light is incident from one of said first film structure and said second film stru...

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Bibliographische Detailangaben
1. Verfasser: SHEN CHONGFEI
Format: Patent
Sprache:eng
Schlagworte:
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