Charged particle beam scanning method and charged particle beam apparatus

In a method of scanning a charged particle beam which can position the scan position to a proper location inside a deflectable range of the scan position of charged particle beam, the scan position of charged particle beam is deflected to a plurality of target objects inside a scan position deflecta...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SASAKI YUKO, NISHIHARA MAKOTO, YANOKURA TOSHIAKI, KAWAI TSUTOMU, EZUMI MAKOTO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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