Method of inspecting memory cell

A method of inspecting a memory cell is provided, including: providing a semiconductor substrate with a capacitor formed therein and a transistor formed thereon, wherein the transistor is electrically connected to the capacitor; inspecting a size of a top surface of the capacitor and a pitch between...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEN YI-NAN, LIU HSIEN-WEN, TSAI TZUING
Format:	Patent
Sprache:	eng
Schlagworte:	INFORMATION STORAGE PHYSICS STATIC STORES
Online-Zugang:	Volltext bestellen
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