Method and system for high-speed precise laser trimming and scan lens for use therein

A method, system and scan lens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path. The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fas...

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Bibliographische Detailangaben
Hauptverfasser: GU BO, JOHNSON SHEPARD D, COUCH BRUCE L, CHU YUN FEE, EHRMANN JONATHAN S, LENTO JOSEPH V
Format: Patent
Sprache:eng
Schlagworte:
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