Cerium salt, producing method thereof, cerium oxide and cerium based polishing slurry

A cerium salt wherein, when 20 g of the cerium salt is dissolved in a mixed liquid of 12.5 g of 6N nitric acid and 12.5 g of a 30% hydrogen peroxide aqueous solution, a concentration of an insoluble component present in the solution is 5 ppm or less by mass ratio to the cerium salt before dissolutio...

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Bibliographische Detailangaben
Hauptverfasser: CHINONE KANSHI, MIYAOKA SEIJI
Format: Patent
Sprache:eng
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