Advanced platform for processing crystalline silicon solar cells

Advanced platform for processing crystalline silicon solar cells

The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containin...

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Hauptverfasser: ZHOU LISONG, SHAH VINAY K, HOLTAM TRISTAN R, LATCHFORD IAN SCOTT, BORDEN PETER G, PORTHOUSE KEITH BRIAN, AQUI DEREK
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator ZHOU LISONG
SHAH VINAY K
HOLTAM TRISTAN R
LATCHFORD IAN SCOTT
BORDEN PETER G
PORTHOUSE KEITH BRIAN
AQUI DEREK
description The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containing layers and one or more metal layers that are deposited and further processed within the various chambers contained in the substrate processing system. In one embodiment, a batch of solar cell substrates is simultaneously transferred in a vacuum or inert environment to prevent contamination from affecting the solar cell formation process.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Advanced platform for processing crystalline silicon solar cells
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