Link processing with high speed beam deflection

The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processi...

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Bibliographische Detailangaben
Hauptverfasser: SVETKOFF DONALD J, JOHNSON SHEPARD D, GRIFFITHS JOSEPH J, PLOTKIN MICHAEL, EHRMANN JONATHAN S, CORDINGLEY JAMES J
Format: Patent
Sprache:eng
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