Pattern forming method and its mold

In a mold in which a pattern is formed of a fine concavo-convex shape, two or more of alignment marks for determining a relative positional relation between a substrate and a mold are formed concentrically. Moreover, a damaged mark is identified from the positional information and shape of the respe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOMORIYA SUSUMU, ANDO TAKASHI, OGINO MASAHIKO, OHTA HIROYA, SOHDA YASUNARI, HAGINOYA CHISEKI, KATAGIRI SOUICHI, MIYAUCHI AKIHIRO, NAKAYAMA YOSHINORI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TRANSPORTING
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