Method for stem sample inspection in a charged particle beam instrument

A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle betwe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAMMER MATTHEW, MOORE THOMAS M, AMADOR GONZALO, ZAYKOVA-FELDMAN LYUDMILA
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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