Semiconductor device having a protection pattern with two element separation regions

A semiconductor device has a circuit element region formed on a semiconductor substrate, and a protective pattern formed so as to surround the circuit element region. The protective pattern comprises a first element separation region formed on the semiconductor substrate, a second element separation...

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Bibliographische Detailangaben
Hauptverfasser: MAEKAWA HIDEAKI, TATSUMI YUUICHI, IKEDA TAKAFUMI, MINAMI TOSHIFUMI, NAKAZAWA TAKAHITO
Format: Patent
Sprache:eng
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