Defects inspecting apparatus and defects inspecting method
An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for de...
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| creator | WATANABE MASAHIRO NISHIYAMA HIDETOSHI OHSHIMA YOSHIMASA JINGU TAKAHIRO NAKATA TOSHIHIKO HAMAMATSU AKIRA NOGUCHI MINORI UTO SACHIO |
| description | An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units. |
| format | Patent |
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| subjects | CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | Defects inspecting apparatus and defects inspecting method |
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