Method of improving ellipsometric and the like data

A system and method for improving data provided by ellipsometer, polarimeter and the like systems involving diminishing the effects of undesirable noise in the intensity of a beam of electromagnetic radiation caused by, for instance, random variations in intensity of a source provided beam of electr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JOHS BLAINE D, LIPHARDT MARTIN M
Format: Patent
Sprache:eng
Schlagworte:
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