Optical sensor for characterizing a substrate

A substrate characterization device is provided which includes an optical sensor module and a processor. The optical sensor module includes a light emitting source and a light receiving detector for communicating with the substrate and providing an indication of the diffusion of light through the su...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WAYMAN WILLIAM H, LIU CHU-HENG, BEACHNER JAMES R
Format:	Patent
Sprache:	eng
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LINING MACHINES MEASURING PERFORMING OPERATIONS PHYSICS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TESTING TRANSPORTING TYPEWRITERS
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