Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers

Various methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers are provided. One method for creating a dynamic sampling scheme for a process during which measurements are performed on wafers includes performing the mea...

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Bibliographische Detailangaben

Hauptverfasser:	ADEL MIKE, IZIKSON PAVEL, ROBINSON JOHN, CHOI DONGSUB, MARCHELLI ANAT, WIDMANN AMIR
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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