Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers

Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers

Various methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers are provided. One method for creating a dynamic sampling scheme for a process during which measurements are performed on wafers includes performing the mea...

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Hauptverfasser: ADEL MIKE, IZIKSON PAVEL, ROBINSON JOHN, CHOI DONGSUB, MARCHELLI ANAT, WIDMANN AMIR
Format: Patent
Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator ADEL MIKE
IZIKSON PAVEL
ROBINSON JOHN
CHOI DONGSUB
MARCHELLI ANAT
WIDMANN AMIR
description Various methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers are provided. One method for creating a dynamic sampling scheme for a process during which measurements are performed on wafers includes performing the measurements on all of the wafers in at least one lot at all measurement spots on the wafers. The method also includes determining an optimal sampling scheme, an enhanced sampling scheme, a reduced sampling scheme, and thresholds for the dynamic sampling scheme for the process based on results of the measurements. The thresholds correspond to values of the measurements at which the optimal sampling scheme, the enhanced sampling scheme, and the reduced sampling scheme are to be used for the process.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
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