Ion beam angle calibration and emittance measurement system for ribbon beams

An ion beam angle calibration and emittance measurement system, comprising a plate comprising an elongated slit therein, wherein the elongated slit positioned at a rotation center of the plate and configured to allow a first beam portion to pass therethrough. A beam current detector located downstre...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FREER BRIAN, FARLEY MARVIN, SAKASE TAKAO, POLNER DONALD, EISNER EDWARD, HORNER RONALD, LAMBERT MARK, SMICK THEODORE, EIDE PAUL, BECKEL DONOVAN, RYDING GEOFFREY
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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