Mass spectrometry unit

A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control por...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YOSHIDA SHUJI, NAKAJIMA TOYOAKI, TANAKA RYOTA, KUROKAWA YUJIROU, YURI TSUTOMU
Format: Patent
Sprache:eng
Schlagworte:
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