Hard coating film, method of formation thereof, and material coated with hard coating film

A hard coating film having wear resistance superior to conventional TiAlN coating films, oxide coating films, and the like. The hard coating film of the present invention has a component composition represented by one of the following two formulas: (TiaAlbSic)Ox, wherein 0.3 a 0.7, 0.3 b 0.7, 0 c 0....

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Bibliographische Detailangaben
Hauptverfasser:	YAMAMOTO KENJI, NAKAKUBO SHOHEI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM METALLURGY PERFORMING OPERATIONS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	A hard coating film having wear resistance superior to conventional TiAlN coating films, oxide coating films, and the like. The hard coating film of the present invention has a component composition represented by one of the following two formulas: (TiaAlbSic)Ox, wherein 0.3 a 0.7, 0.3 b 0.7, 0 c 0.2, a+b+c=1, and 0.8 [x/(2a+1.5b+2c)] 1.2; and (TiaCrdAlbSic)Ox, wherein 0.05 a 0.4, 0.1 d 0.85, 0 b 0.7, 0 c 0.2, a+b+c+d=1, and 0.8 [x/(2a+1.5d+1.5b+2c)] 1.2; where variables a, d, b, and c denote the atomic ratios of Ti, Cr, Al, and Si respectively, and variable x indicates the atomic ratio of O.