System and method for free space micro machined optical bench

An optical bench communicates light through free space in a plurality of trenches formed in the bench, each of the trenches formed by deep ion reactive etching and defined by two opposing side walls, such that the free space is between the opposing side walls. An exemplary embodiment has a first tre...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	DETRY JAMES F
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TRANSMISSION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!