Method for manufacturing electronic device

A method for manufacturing an electronic device using a closed-type transport container, includes: controlling relative humidity inside the closed-type transport container to be lower than ambient relative humidity outside the closed-type transport container on a particular interprocess transport pa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAWASAKI ATSUKO, KIYOTOSHI MASAHIRO, ITO SHOKO, KATANO MAKIKO
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
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