Solid-state imaging device, method of producing the same, and imaging device

A solid-state imaging device includes a semiconductor substrate including a pixel portion having a photoelectric conversion portion and a peripheral circuit portion; a first sidewall composed of a sidewall film and disposed on each sidewall of gate electrodes of MOS transistors in the pixel portion;...

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Bibliographische Detailangaben
Hauptverfasser: TATANI KEIJI, KUBO NORIHIRO, MATSUMOTO TAKUJI, ITONAGA KAZUICHIRO, OOKI SUSUMU, NISHIMURA YUTAKA, YAMAGUCHI TETSUJI, IZAWA SHINICHIRO, KOGA FUMIHIKO, MORI HIROYUKI
Format: Patent
Sprache:eng
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