Capacitors and methods of manufacture thereof

Capacitors are formed in metallization layers of semiconductor device in regions where functional conductive features are not formed, more efficiently using real estate of integrated circuits. The capacitors may be stacked and connected in parallel to provide increased capacitance, or arranged in ar...

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1. Verfasser:	HIERLEMANN MATTHIAS
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
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creator	HIERLEMANN MATTHIAS
description	Capacitors are formed in metallization layers of semiconductor device in regions where functional conductive features are not formed, more efficiently using real estate of integrated circuits. The capacitors may be stacked and connected in parallel to provide increased capacitance, or arranged in arrays. The plates of the capacitors are substantially the same dimensions as conductive features, such as conductive lines or vias, or are substantially the same dimensions as fill structures of the semiconductor device.
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subjects	ELECTRICITY
title	Capacitors and methods of manufacture thereof
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