Apparatus and method for transferring two or more wafers whereby the positions of the wafers can be measured
A method and an apparatus for transferring a substantially flat and substantially circular objects, such as wafers, from a pick-up position to a delivery position, the apparatus comprising, a manipulator, at least one source for emitting a source signal, at least one sensor for sensing said source s...
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| creator | DE RIDDER CHRISTIANUS GERARDUS MARIA OOSTERLAKEN THEODORUS GERARDUS MARIA |
| description | A method and an apparatus for transferring a substantially flat and substantially circular objects, such as wafers, from a pick-up position to a delivery position, the apparatus comprising, a manipulator, at least one source for emitting a source signal, at least one sensor for sensing said source signal and for providing a sensor signal, a computing device arranged for processing at least one sensor signal to obtain data on the position of said object, the manipulator being arranged for simultaneously transferring a first and a second object along a path in a substantially parallel orientation, spaced apart from each other, and substantially co-axially whereby the central axis of each object may be displaced radially, a said source and a said sensor are connected by a virtual line, whereby the virtual line includes an angle with the central axes of the first and second objects. |
| format | Patent |
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| subjects | CALCULATING COMPUTING COUNTING DETECTING MASSES OR OBJECTS ELECTRIC DIGITAL DATA PROCESSING GEOPHYSICS GRAVITATIONAL MEASUREMENTS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | Apparatus and method for transferring two or more wafers whereby the positions of the wafers can be measured |
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