Integrated capacitor arrangement for ultrahigh capacitance values

An electronic device includes at least one trench capacitor that can also take the form of an inverse structure, a pillar capacitor. An alternating layer sequence of at least two dielectric layers and at least two electrically conductive layers is provided in the trench capacitor or on the pillar ca...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KEMMEREN ANTONIUS L. A. M, REEFMAN DERK, KLOOTWIJK JOHAN H, VERHOEVEN JOHANNES F. C. M, ROOZEBOOM FREDDY
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE ELECTRICITY
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