Piezoelectric actuation structure including an integrated piezoresistive strain gauge and its production method

Piezoelectric actuation structure including an integrated piezoresistive strain gauge and its production method

The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least...

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Hauptverfasser: CUEFF MATTHIEU, DEFAY EMMANUEL, REY PATRICE, PERRUCHOT FRANCOIS
Format: Patent
Sprache:eng
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ELECTRICITY
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creator CUEFF MATTHIEU
DEFAY EMMANUEL
REY PATRICE
PERRUCHOT FRANCOIS
description The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, characterized in that the strain gauge is a piezoresistive gauge located in the top electrode layer and/or the bottom electrode layer, the layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge. The invention also relates to a method for producing such a structure.
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title Piezoelectric actuation structure including an integrated piezoresistive strain gauge and its production method
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