Method for forming ceramic thick film element arrays with fine feature size, high-precision definition, and/or high aspect ratios

A method is provided that includes providing a mold on a temporary substrate, e.g., a sapphire substrate. Next, a material such as PZT paste is deposited into the mold. Then, the mold is removed to obtain elements formed by the mold. The formed elements will then be sintered. After sintering, electr...

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Bibliographische Detailangaben
Hauptverfasser: XU BAOMIN, WHITE STEPHEN D, BUHLER STEVEN A
Format: Patent
Sprache:eng
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