Method of fabricating a magnetic stack design with decreased substrate stress

Method of fabricating a magnetic stack design with decreased substrate stress

A magnetic element and a method for making a magnetic element. The method includes patterning a first electrode material to form a first electrode on a substrate and depositing filler material on the substrate around the first electrode. The method further includes polishing to form a planar surface...

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Hauptverfasser: AHN YONGCHUL, JIA LILI, HAUNG SHUIYUAN, HUTCHINSON CHRISTINA LAURA, IVANOV IVAN, KHOUEIR ANTOINE, DIMITROV DIMITAR, ANDERSON PAUL
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Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator AHN YONGCHUL
JIA LILI
HAUNG SHUIYUAN
HUTCHINSON CHRISTINA LAURA
IVANOV IVAN
KHOUEIR ANTOINE
DIMITROV DIMITAR
ANDERSON PAUL
description A magnetic element and a method for making a magnetic element. The method includes patterning a first electrode material to form a first electrode on a substrate and depositing filler material on the substrate around the first electrode. The method further includes polishing to form a planar surface of filler and the first electrode. A magnetic cell is formed on the planar surface and a second electrode is formed on the magnetic cell. In some embodiments, the first electrode has an area that is at least 2:1 to the area of the magnetic cell.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Method of fabricating a magnetic stack design with decreased substrate stress
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