Embedded microelectromechanical systems (MEMS) semiconductor substrate and related method of forming

An embedded MEMS semiconductor substrate is set forth and can be a starting material for subsequent semiconductor device processing. A MEMS device is formed in a semiconductor substrate, including at least one MEMS electrode and a buried silicon dioxide sacrificial layer has been applied for releasi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NGUYEN LOI, MOHANAKRISHNASWAMY VENKATESH, LE NEEL OLIVIER, SANA PEYMAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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